Invention Grant
- Patent Title: Programmable self-aligning liquid magnetic nanoparticle masks and methods for their use
- Patent Title (中): 可编程自调心液磁纳米颗粒面罩及其使用方法
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Application No.: US12905857Application Date: 2010-10-15
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Publication No.: US08426082B2Publication Date: 2013-04-23
- Inventor: Benjamin B. Yellen , Gennady Friedman
- Applicant: Benjamin B. Yellen , Gennady Friedman
- Applicant Address: US PA Philadelphia
- Assignee: Drexel University
- Current Assignee: Drexel University
- Current Assignee Address: US PA Philadelphia
- Agency: Riverside Law LLP
- Main IPC: G03F1/50
- IPC: G03F1/50
Abstract:
Magnetic nanoparticle masks for lithographic applications of a substrate and methods for producing such masks via defining regions of localized magnetic field maxima and minima on a substrate are provided. Also provided are methods for producing multi-component patterns on a substrate with the magnetic nanoparticle masks.
Public/Granted literature
- US20110086297A1 Programmable Self-Aligning Liquid Magnetic Nanoparticle Masks and Methods for Their Use Public/Granted day:2011-04-14
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