Invention Grant
- Patent Title: Method for manufacturing capacitive electromechanical transducer
- Patent Title (中): 制造电容式机电换能器的方法
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Application No.: US13319970Application Date: 2010-05-13
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Publication No.: US08426235B2Publication Date: 2013-04-23
- Inventor: Chienliu Chang
- Applicant: Chienliu Chang
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2009-121006 20090519
- International Application: PCT/JP2010/003253 WO 20100513
- International Announcement: WO2010/134302 WO 20101125
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm.
Public/Granted literature
- US20120058587A1 METHOD FOR MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER Public/Granted day:2012-03-08
Information query
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