Invention Grant
US08426235B2 Method for manufacturing capacitive electromechanical transducer 失效
制造电容式机电换能器的方法

  • Patent Title: Method for manufacturing capacitive electromechanical transducer
  • Patent Title (中): 制造电容式机电换能器的方法
  • Application No.: US13319970
    Application Date: 2010-05-13
  • Publication No.: US08426235B2
    Publication Date: 2013-04-23
  • Inventor: Chienliu Chang
  • Applicant: Chienliu Chang
  • Applicant Address: JP Tokyo
  • Assignee: Canon Kabushiki Kaisha
  • Current Assignee: Canon Kabushiki Kaisha
  • Current Assignee Address: JP Tokyo
  • Agency: Canon U.S.A., Inc. IP Division
  • Priority: JP2009-121006 20090519
  • International Application: PCT/JP2010/003253 WO 20100513
  • International Announcement: WO2010/134302 WO 20101125
  • Main IPC: H01L21/02
  • IPC: H01L21/02
Method for manufacturing capacitive electromechanical transducer
Abstract:
A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm.
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