Invention Grant
US08426280B2 Charge trap type non-volatile memory device and method for fabricating the same 有权
电荷阱型非易失性存储器件及其制造方法

Charge trap type non-volatile memory device and method for fabricating the same
Abstract:
There is provided a charge trap type non-volatile memory device and a method for fabricating the same, the charge trap type non-volatile memory device including: a tunnel insulation layer formed over a substrate; a charge trap layer formed over the tunnel insulation layer, the charge trap layer including a charge trap polysilicon thin layer and a charge trap nitride-based layer; a charge barrier layer formed over the charge trap layer; a gate electrode formed over the charge barrier layer; and an oxide-based spacer formed over sidewalls of the charge trap layer and provided to isolate the charge trap layer.
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