Invention Grant
- Patent Title: Method of formation of coherent wavy nanostructures (variants)
- Patent Title (中): 形成相干波状纳米结构的方法（变体）
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Application No.: US13164387Application Date: 2011-06-20
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Publication No.: US08426320B2Publication Date: 2013-04-23
- Inventor: Valery K. Smirnov , Dmitry S. Kibalov
- Applicant: Valery K. Smirnov , Dmitry S. Kibalov
- Applicant Address: US CA San Francisco
- Assignee: Wostec, Inc.
- Current Assignee: Wostec, Inc.
- Current Assignee Address: US CA San Francisco
- Agency: Frommer Lawrence & Haug LLP
- Agent Bruce E. Black
- Priority: RU2003129927 20031010
- Main IPC: H01L21/31
- IPC: H01L21/31
Abstract:
The method for forming wavelike coherent nanostructures by irradiating a surface of a material by a homogeneous flow of ions is disclosed. The rate of coherency is increased by applying preliminary preprocessing steps.
Public/Granted literature
- US20110248386A1 METHOD OF FORMATION OF COHERENT WAVY NANOSTRUCTURES (VARIANTS) Public/Granted day:2011-10-13
Information query
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