Invention Grant
- Patent Title: Electron microscope
- Patent Title (中): 电子显微镜
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Application No.: US13059550Application Date: 2009-07-10
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Publication No.: US08426811B2Publication Date: 2013-04-23
- Inventor: Isao Nagaoki , Toshiaki Tanigaki
- Applicant: Isao Nagaoki , Toshiaki Tanigaki
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-252130 20080930
- International Application: PCT/JP2009/062928 WO 20090710
- International Announcement: WO2010/038534 WO 20100408
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K7/00

Abstract:
An electron microscope according to the present invention includes a phase plate (510) having a thickness which changes in a radial direction, and adjusts a phase difference caused by a difference in electron beam path due to an effect of a spherical aberration when an electron beam is converged by a lens or an image of the electron beam is formed. Accordingly, the phase difference caused by the difference in electron beam path is adjusted, to thereby improve the coherence, so that a phase contrast image of transmitted electrons can be obtained at a higher resolution.
Public/Granted literature
- US20110133084A1 ELECTRON MICROSCOPE Public/Granted day:2011-06-09
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