Invention Grant
- Patent Title: Bolometer pixel provided with a MIM integration capacitor
- Patent Title (中): 配有MIM集成电容器的转速计像素
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Application No.: US12720340Application Date: 2010-03-09
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Publication No.: US08426815B2Publication Date: 2013-04-23
- Inventor: Bertrand Dupont
- Applicant: Bertrand Dupont
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0952033 20090331
- Main IPC: G01J5/00
- IPC: G01J5/00 ; G01J5/02 ; G01J5/12

Abstract:
A thermal imaging microelectronic device including: a support, a plurality of metal levels for interconnecting electronic components formed on the support, an array of thermal detectors formed on the support, each detector including a membrane with which radiant energy may be absorbed and one or more electric signals may be provided depending on the absorbed radiant energy, and a readout circuit that reads out the electric signals from the membrane, the readout circuit being integrated to the support, and at least several of the detectors having a readout circuit provided with an integrator including at least one integration capacitor disposed facing the membrane, the capacitor having at least one upper plate made in a given interconnection metal level of the plurality of interconnection metal levels.
Public/Granted literature
- US20100243892A1 BOLOMETER PIXEL PROVIDED WITH A MIM INTEGRATION CAPACITOR Public/Granted day:2010-09-30
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