Invention Grant
- Patent Title: Infrared sensor
- Patent Title (中): 红外传感器
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Application No.: US12998213Application Date: 2009-09-24
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Publication No.: US08426864B2Publication Date: 2013-04-23
- Inventor: Koji Tsuji , Yosuke Hagihara , Naoki Ushiyama
- Applicant: Koji Tsuji , Yosuke Hagihara , Naoki Ushiyama
- Applicant Address: JP Kadoma-shi
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Kadoma-shi
- Agency: Edwards Wildman Palmer LLP
- Agent James E. Armstrong, IV; George N. Chaclas
- Priority: JP2008-246927 20080925; JP2009-087008 20090331; JP2009-087009 20090331
- International Application: PCT/JP2009/066510 WO 20090924
- International Announcement: WO2010/035739 WO 20100401
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
The infrared sensor (1) includes a base (10), and an infrared detection element (3) formed over a surface of the base (10). The infrared detection element (3) comprises an infrared absorption member (33) in the form of a thin film configured to absorb infrared, and a temperature detection member (30) configured to measure a temperature difference between the infrared absorption member (33) and the base (10). The temperature detection member (30) includes a p-type polysilicon layer (35) formed over the infrared absorption member (33) and the base (10), an n-type polysilicon layer (34) formed over the infrared absorption member (33) and the base (10) without contact with the p-type polysilicon layer (33), and a connection layer (36) configured to electrically connect the p-type polysilicon layer (35) to the n-type polysilicon layer (34). Each of the p-type polysilicon layer (35) and the n-type polysilicon layer (34) has an impurity concentration in a range of 1018 to 1020 cm−3. The p-type polysilicon layer (35) has its thickness of λ/4n1p, wherein λ denotes a center wavelength of the infrared to be detected by the infrared detection element (3), and n1p denotes a reflective index of the p-type polysilicon layer (35). The n-type polysilicon layer (34) has its thickness of λ/4n1n, wherein n1n denotes a reflective index of the n-type polysilicon layer (34).
Public/Granted literature
- US20110175100A1 Infrared sensor Public/Granted day:2011-07-21
Information query
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