Invention Grant
- Patent Title: Semiconductor device and method of fabricating the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12723917Application Date: 2010-03-15
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Publication No.: US08426891B2Publication Date: 2013-04-23
- Inventor: Masakazu Goto
- Applicant: Masakazu Goto
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Turocy & Watson, LLP
- Priority: JP2009-152675 20090626
- Main IPC: H01L31/072
- IPC: H01L31/072

Abstract:
A semiconductor substrate according to one embodiment includes: a first transistor having a first gate insulating film formed on a semiconductor substrate, a first gate electrode formed on the first gate insulating film and a first sidewall formed on a side face of the first gate electrode, the first gate insulating film comprising a high-dielectric constant material as a base material, a part of the first sidewall contacting with the first gate insulating film and containing Si and N; and a second transistor having a second gate insulating film formed on the semiconductor substrate, a second gate electrode formed on the second gate insulating film and a second sidewall formed on a side face of the second gate electrode so as to contact with the second gate insulating film, the second gate insulating film comprising a high-dielectric constant material as a base material, a part of the second sidewall contacting with the second gate insulating film and containing Si and N, wherein at least one of an abundance ratio of Si—H bond to N—H bond per unit volume, an amount of Cl per unit volume and an amount of H per unit volume of the second sidewall is larger than that of the first sidewall; and a threshold voltage of the second transistor is higher than that of the first transistor.
Public/Granted literature
- US20100327372A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2010-12-30
Information query
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