Invention Grant
- Patent Title: Apparatus and method for microfabricated multi-dimensional sensors and sensing systems
- Patent Title (中): 微型多维传感器和传感系统的装置和方法
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Application No.: US13271659Application Date: 2011-10-12
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Publication No.: US08426932B2Publication Date: 2013-04-23
- Inventor: Joseph R. Stetter
- Applicant: Joseph R. Stetter
- Applicant Address: US CA Newark
- Assignee: KWJ Engineering Inc.
- Current Assignee: KWJ Engineering Inc.
- Current Assignee Address: US CA Newark
- Agency: Dinsmore & Shohl LLP
- Main IPC: H01L29/82
- IPC: H01L29/82

Abstract:
A universal microelectromechanical (MEMS) nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer to make multiple sensing capability on a single MEMS fabricated device. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables and producing more than one type of sensor for one or more significant parameters that need to be monitored.
Public/Granted literature
- US20120050038A1 Apparatus and Method for Microfabricated Multi-Dimensional Sensors and Sensing Systems Public/Granted day:2012-03-01
Information query
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