- Patent Title: Micro-electro-mechanical system device and method for making same
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Application No.: US13178121Application Date: 2011-07-07
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Publication No.: US08426934B2Publication Date: 2013-04-23
- Inventor: Sheng Ta Lee , Chuan Wei Wang
- Applicant: Sheng Ta Lee , Chuan Wei Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Pixart Imaging Incorporation
- Current Assignee: Pixart Imaging Incorporation
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Priority: TW97115834A 20080430
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
According to the present invention, a micro-electro-mechanical system (MEMS) device comprises: a thin film structure including at least a metal layer and a protection layer deposited in any order; and a protrusion connected under the thin film structure. A preferred thin film structure includes at least a lower protection layer, a metal layer and an upper protection layer. The MEMS device for example is a capacitive MEMS acoustical sensor.
Public/Granted literature
- US20110260268A1 Micro-Electro-Mechanical System Device and Method for Making Same Public/Granted day:2011-10-27
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