Invention Grant
- Patent Title: Non-volatile semiconductor storage device and method of manufacturing the same
- Patent Title (中): 非易失性半导体存储装置及其制造方法
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Application No.: US12392636Application Date: 2009-02-25
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Publication No.: US08426976B2Publication Date: 2013-04-23
- Inventor: Megumi Ishiduki , Hideaki Aochi , Ryota Katsumata , Hiroyasu Tanaka , Masaru Kidoh , Masaru Kito , Yoshiaki Fukuzumi , Yosuke Komori , Yasuyuki Matsuoka
- Applicant: Megumi Ishiduki , Hideaki Aochi , Ryota Katsumata , Hiroyasu Tanaka , Masaru Kidoh , Masaru Kito , Yoshiaki Fukuzumi , Yosuke Komori , Yasuyuki Matsuoka
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-65886 20080314
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L21/28

Abstract:
A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a columnar semiconductor layer extending in a direction perpendicular to a substrate; a plurality of conductive layers formed at a sidewall of the columnar semiconductor layer via memory layers; and interlayer insulation layers formed above of below the conductive layers. A sidewall of the conductive layers facing the columnar semiconductor layer is formed to be inclined such that the distance thereof from a central axis of the columnar semiconductor layer becomes larger at lower position thereof than at upper position thereof. While, a sidewall of the interlayer insulation layers facing the columnar semiconductor layer is formed to be inclined such that the distance thereof from a central axis of the columnar semiconductor layer becomes smaller at lower position thereof than at upper position thereof.
Public/Granted literature
- US20090230458A1 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-09-17
Information query
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