Invention Grant
US08427183B2 Probe card assembly having an actuator for bending the probe substrate
有权
探针卡组件具有用于弯曲探针基板的致动器
- Patent Title: Probe card assembly having an actuator for bending the probe substrate
- Patent Title (中): 探针卡组件具有用于弯曲探针基板的致动器
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Application No.: US13092709Application Date: 2011-04-22
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Publication No.: US08427183B2Publication Date: 2013-04-23
- Inventor: Gaetan L. Mathieu , Benjamin N. Eldridge , Gary W. Grube
- Applicant: Gaetan L. Mathieu , Benjamin N. Eldridge , Gary W. Grube
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kirton McConkie
- Main IPC: G01R31/00
- IPC: G01R31/00
Abstract:
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
Public/Granted literature
- US20110193583A1 METHODS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR Public/Granted day:2011-08-11
Information query
