Invention Grant
- Patent Title: Probe wafer, probe device, and testing system
- Patent Title (中): 探头晶圆,探针装置和测试系统
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Application No.: US12857483Application Date: 2010-08-16
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Publication No.: US08427187B2Publication Date: 2013-04-23
- Inventor: Yoshio Komoto , Yoshiharu Umemura
- Applicant: Yoshio Komoto , Yoshiharu Umemura
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
There is provided a testing system for testing a plurality of semiconductor chips formed on a single semiconductor wafer. The testing system includes a wafer substrate, a plurality of wafer connector terminals that are provided on the wafer substrate in such a manner that one or more wafer connector terminals correspond to each of the semiconductor chips, where each wafer connector terminal is to be electrically connected to an input/output terminal of a corresponding semiconductor chip, a plurality of circuit units that are provided on the wafer substrate in such a manner that one or more circuit units corresponds to each of the semiconductor chips, where each circuit unit generates a test signal to be used for testing a corresponding semiconductor chip and supplies the test signal to the corresponding semiconductor chip to test the corresponding semiconductor chip, and a controller that generates a control signal used to control the plurality of circuit units.
Public/Granted literature
- US20110121848A1 PROBE WAFER, PROBE DEVICE, AND TESTING SYSTEM Public/Granted day:2011-05-26
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