Invention Grant
US08428286B2 MEMS microphone packaging and MEMS microphone module 有权
MEMS麦克风封装和MEMS麦克风模块

MEMS microphone packaging and MEMS microphone module
Abstract:
A method for producing a microphone module includes arranging a MEMS microphone structure on a first surface of a first substrate, the first substrate further including a second surface, which is opposite to the first surface. Furthermore, a cap is arranging on the first surface of the first substrate such that the cap and the first surface enclose the MEMS microphone structure. A readout device for the MEMS microphone structure is arranged on a first surface of a second substrate which further includes a second surface, which is opposite to the first surface. The second surface of the first substrate is attached to the second surface of the second substrate.
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