Invention Grant
- Patent Title: MEMS microphone packaging and MEMS microphone module
- Patent Title (中): MEMS麦克风封装和MEMS麦克风模块
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Application No.: US12627833Application Date: 2009-11-30
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Publication No.: US08428286B2Publication Date: 2013-04-23
- Inventor: Marc Fueldner , Martin Wurzer , Alfons Dehe
- Applicant: Marc Fueldner , Martin Wurzer , Alfons Dehe
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/50

Abstract:
A method for producing a microphone module includes arranging a MEMS microphone structure on a first surface of a first substrate, the first substrate further including a second surface, which is opposite to the first surface. Furthermore, a cap is arranging on the first surface of the first substrate such that the cap and the first surface enclose the MEMS microphone structure. A readout device for the MEMS microphone structure is arranged on a first surface of a second substrate which further includes a second surface, which is opposite to the first surface. The second surface of the first substrate is attached to the second surface of the second substrate.
Public/Granted literature
- US20110127623A1 MEMS Microphone Packaging and MEMS Microphone Module Public/Granted day:2011-06-02
Information query
IPC分类: