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US08429587B2 Method for decomposing a designed pattern layout 失效
分解设计图案布局的方法

Method for decomposing a designed pattern layout
Abstract:
A method for decomposing a designed pattern layout and a method for fabricating an exposure mask using the same. After the designed pattern layout is automatically decomposed to obtain a plurality of mask layouts, a problematic region is determined through simulation of the mask layout, and fed back to correct the designed pattern layout. As a result, problems can be detected in each process and corrected to reduce the process time.
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