Invention Grant
- Patent Title: Method for producing a bulk wave acoustic resonator of FBAR type
- Patent Title (中): FBAR型体声波谐振器的制造方法
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Application No.: US12960475Application Date: 2010-12-04
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Publication No.: US08431031B2Publication Date: 2013-04-30
- Inventor: Mathieu Pijolat
- Applicant: Mathieu Pijolat
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Baker Hostetler LLP
- Priority: FR0905874 20091204
- Main IPC: H01B13/34
- IPC: H01B13/34

Abstract:
A method for fabricating a bulk wave acoustic resonator (FBAR) which includes at least locally a partially suspended thin layer of piezoelectric material, and includes the following steps: the formation of at least one first so-called lower electrode on the surface of a thin layer of piezoelectric material; the deposition of a so-called sacrificial layer on the surface of the said thin layer of piezoelectric material and of the said first electrode defining a first set; the assembling of the said first set with a second substrate; the formation of at least one second electrode termed the upper electrode on the opposite face of the said thin layer of piezoelectric material from the face comprising the said first electrode; and the elimination of the sacrificial layer so as to unveil the said thin layer of piezoelectric material and the said first electrode and define the bulk wave resonator.
Public/Granted literature
- US20110132866A1 Method for Producing a Bulk Wave Acoustic Resonator of FBAR Type Public/Granted day:2011-06-09
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