Invention Grant
- Patent Title: Micro-electro mechanical tunneling switch
- Patent Title (中): 微电机械隧道开关
-
Application No.: US11943146Application Date: 2007-11-20
-
Publication No.: US08432239B2Publication Date: 2013-04-30
- Inventor: Carl O. Bozler , Craig L. Keast , Jeremy Muldavin
- Applicant: Carl O. Bozler , Craig L. Keast , Jeremy Muldavin
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Gesmer Updegrove LLP
- Main IPC: H01H51/22
- IPC: H01H51/22

Abstract:
A micro-electromechanical system switch includes a substrate and a plurality of actuating electrodes formed the substrate wherein each actuating electrode is activatable. A cantilever beam has a first end and a second end and a plurality of stops formed thereon. The plurality of stops engages the substrate between the plurality of actuating electrode. A contact area is formed in the substrate and located to engage the second end of the cantilever beam. A voltage source applies a voltage to each actuating electrode independently in a sequence from an actuating electrode located adjacent to the first end of the cantilever beam to an actuating electrode located adjacent to the second end of the cantilever beam so that the plurality of stops sequentially engage the substrate between the plurality of actuating electrodes.
Public/Granted literature
- US20080135386A1 MICRO-ELECTRO MECHANICAL TUNNELING SWITCH Public/Granted day:2008-06-12
Information query