Invention Grant
- Patent Title: Fluid control apparatus
- Patent Title (中): 流体控制装置
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Application No.: US12451649Application Date: 2008-05-26
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Publication No.: US08434522B2Publication Date: 2013-05-07
- Inventor: Wataru Okase , Shuji Moriya , Tomohiro Nakata , Tsutomu Shinohara , Michio Yamaji
- Applicant: Wataru Okase , Shuji Moriya , Tomohiro Nakata , Tsutomu Shinohara , Michio Yamaji
- Applicant Address: JP Tokyo JP Osaka-shi
- Assignee: Tokyo Electron Limited,Fujikin Incorporated
- Current Assignee: Tokyo Electron Limited,Fujikin Incorporated
- Current Assignee Address: JP Tokyo JP Osaka-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-144918 20070531
- International Application: PCT/JP2008/059628 WO 20080526
- International Announcement: WO2008/149702 WO 20081211
- Main IPC: F16K11/10
- IPC: F16K11/10

Abstract:
There is provided a fluid control apparatus which can reduce the number of members and can improve the assembling operation efficiency.A pressure indication device 4 to be replaced with a relatively-higher frequency is coupled to a base block 5 existing thereunder through male screw members 17 from above. An on-off valve 6 to be replaced with a relatively-lower frequency has, at its lower portion, a block-shaped main body 6a formed integrally therewith. The main body 6a of the on-off valve 6 is coupled to the base block 5 through male screw members 18 in the forward and rearward directions.
Public/Granted literature
- US20100096031A1 FLUID CONTROL APPARATUS Public/Granted day:2010-04-22
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