Invention Grant
US08434992B2 Arm mechanism, and vacuum robot provided with the same 有权
臂机构和真空机器人配备相同

Arm mechanism, and vacuum robot provided with the same
Abstract:
A first decelerator is placed in an arm base such that a lower end of a decelerator shaft is bared in the arm base. A first arm has a hermetic space which becomes equal in pressure to a hermetic space of the arm base when an upper end of the hollow decelerator shaft is inserted thereinto, and is secured to a first decelerator output shaft. A second decelerator is placed on a distal end of the first arm, and has an input shaft connected to the decelerator shaft. A second arm is secured to an output shaft of the second decelerator, and has no hermetic space formed therein. A link mechanism follows the first and second arms.
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