Invention Grant
- Patent Title: Robot apparatus and processing apparatus provided therewith, ashing system, and ashing method
- Patent Title (中): 机器人装置及其处理装置,灰化系统和灰化方法
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Application No.: US12516819Application Date: 2007-11-30
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Publication No.: US08434993B2Publication Date: 2013-05-07
- Inventor: Hidehito Azumano , Masahiro Tanabe
- Applicant: Hidehito Azumano , Masahiro Tanabe
- Applicant Address: JP Yokohama-Shi
- Assignee: Shibaura-Mechatronics Corporation
- Current Assignee: Shibaura-Mechatronics Corporation
- Current Assignee Address: JP Yokohama-Shi
- Agency: Pearne & Gordon LLP
- Priority: JP2006-328872 20061205
- International Application: PCT/JP2007/073182 WO 20071130
- International Announcement: WO2008/069130 WO 20080612
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A robot apparatus according to the invention is configured to hand over a workpiece by rotating by a prescribed angle a finger including a holding means for holding the workpiece. The robot apparatus includes: a drive shaft including a first finger and a second finger spaced from each other. The first finger includes a first arm portion and a second arm portion extending from its rotation center with a prescribed angle therebetween so as to be distanced from each other. The second finger includes a third arm portion and a fourth arm portion extending from its rotation center with a prescribed angle therebetween so as to be distanced from each other. The second arm portion and the fourth arm portion are distanced from each other when the first arm portion and the third arm portion overlap in the axial direction of the drive shaft. The robot apparatus can further improve productivity without incurring size increase and high cost.
Public/Granted literature
- US20100048035A1 ROBOT APPARATUS AND PROCESSING APPARATUS PROVIDED THEREWITH, ASHING SYSTEM, AND ASHING METHOD Public/Granted day:2010-02-25
Information query
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