Invention Grant
- Patent Title: Chemical-mechanical planarization pad including patterned structural domains
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Application No.: US12694593Application Date: 2010-01-27
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Publication No.: US08435099B2Publication Date: 2013-05-07
- Inventor: Paul Lefevre , Anoop Mathew , Scott Xin Qiao , Guangwei Wu , David Adam Wells , Oscar K. Hsu
- Applicant: Paul Lefevre , Anoop Mathew , Guangwei Wu , David Adam Wells , Oscar K. Hsu , Xuechan Zhao
- Applicant Address: US MA Wilmington
- Assignee: Innopad, Inc.
- Current Assignee: Innopad, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Grossman, Tucker, Perreault & Pfleger, PLLC
- Main IPC: B24D11/00
- IPC: B24D11/00

Abstract:
An aspect of the present disclosure relates to a chemical mechanical planarization pad including a first domain and a second continuous domain wherein the first domain includes discrete elements regularly spaced within the second continuous domain. The pad may be formed by forming a plurality of openings for a first domain within a second continuous domain of the pad, wherein the openings are regularly spaced within the second domain, and forming the first domain within the plurality of openings in second continuous domain. In addition, the pad may be used in polishing a substrate with a polishing slurry.
Public/Granted literature
- US20100221985A1 CHEMICAL-MECHANICAL PLANARIZATION PAD INCLUDING PATTERNED STRUCTURAL DOMAINS Public/Granted day:2010-09-02
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