Invention Grant
US08435594B2 Evaporation apparatus, method of manufacturing anode using same, and method of manufacturing battery using same
有权
蒸发装置，使用该阳极的阳极的制造方法以及使用其制造电池的方法
- Patent Title: Evaporation apparatus, method of manufacturing anode using same, and method of manufacturing battery using same
- Patent Title (中): 蒸发装置，使用该阳极的阳极的制造方法以及使用其制造电池的方法
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Application No.: US12197731Application Date: 2008-08-25
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Publication No.: US08435594B2Publication Date: 2013-05-07
- Inventor: Isamu Konishiike , Chisato Okina , Keisuke Tanabe , Atsuhiro Abe , Hidetoshi Nishiyama , Kenichi Kawase , Shunsuke Kurasawa , Koichi Matsumoto
- Applicant: Isamu Konishiike , Chisato Okina , Keisuke Tanabe , Atsuhiro Abe , Hidetoshi Nishiyama , Kenichi Kawase , Shunsuke Kurasawa , Koichi Matsumoto
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-229850 20070905
- Main IPC: B05D5/12
- IPC: B05D5/12 ; C23C14/00
Abstract:
An evaporation apparatus that is capable of stably forming a good quality thin film and is highly suitable for mass production is provided. The evaporation apparatus include an evaporation source discharging an evaporation material by heating, a retention member retaining an evaporation object, and a heat shield member that is located between the evaporation source and the evaporation object retained by the retention member, has an opening for passing the evaporation material in a state of vapor phase from the evaporation source to the evaporation object, and shields the evaporation object from part of radiation heat of the evaporation source. The heat shield member is located closer to the evaporation source than to the retention member.
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