Invention Grant
US08435597B2 Diamond UV-sensor element and manufacturing method thereof, UV-sensor unit, and method of treating diamond single crystal
失效
金刚石紫外线传感器元件及其制造方法，UV传感器单元和处理金刚石单晶的方法
- Patent Title: Diamond UV-sensor element and manufacturing method thereof, UV-sensor unit, and method of treating diamond single crystal
- Patent Title (中): 金刚石紫外线传感器元件及其制造方法，UV传感器单元和处理金刚石单晶的方法
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Application No.: US12866554Application Date: 2009-02-09
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Publication No.: US08435597B2Publication Date: 2013-05-07
- Inventor: Yasuo Koide , Meiyong Liao , Jose Alvarez , Jean-Paul Kleider
- Applicant: Yasuo Koide , Meiyong Liao , Jose Alvarez , Jean-Paul Kleider
- Applicant Address: JP Ibaraki FR Paris Cedex
- Assignee: National Institute for Materials Science,Centre National de la Recherche Scientifique
- Current Assignee: National Institute for Materials Science,Centre National de la Recherche Scientifique
- Current Assignee Address: JP Ibaraki FR Paris Cedex
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2008-027232 20080207
- International Application: PCT/JP2009/052172 WO 20090209
- International Announcement: WO2009/099233 WO 20090813
- Main IPC: B05D5/00
- IPC: B05D5/00
Abstract:
A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.
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