Invention Grant
- Patent Title: Method for forming carbon nanotube
- Patent Title (中): 形成碳纳米管的方法
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Application No.: US13122057Application Date: 2009-10-28
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Publication No.: US08435601B2Publication Date: 2013-05-07
- Inventor: Suguru Noda , Koji Furuichi
- Applicant: Suguru Noda , Koji Furuichi
- Applicant Address: JP JP
- Assignee: University of Tokyo,Dainippon Screen Mfg. Co., Ltd.
- Current Assignee: University of Tokyo,Dainippon Screen Mfg. Co., Ltd.
- Current Assignee Address: JP JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2008-278869 20081029
- International Application: PCT/JP2009/068516 WO 20091028
- International Announcement: WO2010/050517 WO 20100506
- Main IPC: C23C16/26
- IPC: C23C16/26 ; C23C16/06

Abstract:
Disclosed is a method of forming carbon nanotubes on a conductor that covers a portion of a substrate, the method includes depositing a mesh-like conductive member made of Mo or the like on a substrate made of glass or the like, forming a catalyst support, such as Al2O3, and a catalyst such as Fe or Co on the conductive member, placing the substrate in a carbon-source gas atmosphere, and generating heat with the conductive member for a short period of time to grow nanotubes while avoiding damage to the substrate.
Public/Granted literature
- US20110189394A1 METHOD FOR FORMING CARBON NANOTUBE Public/Granted day:2011-08-04
Information query
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