Invention Grant
US08435601B2 Method for forming carbon nanotube 有权
形成碳纳米管的方法

Method for forming carbon nanotube
Abstract:
Disclosed is a method of forming carbon nanotubes on a conductor that covers a portion of a substrate, the method includes depositing a mesh-like conductive member made of Mo or the like on a substrate made of glass or the like, forming a catalyst support, such as Al2O3, and a catalyst such as Fe or Co on the conductive member, placing the substrate in a carbon-source gas atmosphere, and generating heat with the conductive member for a short period of time to grow nanotubes while avoiding damage to the substrate.
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