Invention Grant
US08435719B2 Tunable contact angle process for immersionlithography topcoats and photoresists
有权
用于浸蚀光面涂层和光致抗蚀剂的可调接触角过程
- Patent Title: Tunable contact angle process for immersionlithography topcoats and photoresists
- Patent Title (中): 用于浸蚀光面涂层和光致抗蚀剂的可调接触角过程
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Application No.: US11500663Application Date: 2006-08-08
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Publication No.: US08435719B2Publication Date: 2013-05-07
- Inventor: Dario Leonardo Goldfarb
- Applicant: Dario Leonardo Goldfarb
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Nugent & Smith, LLP
- Agent Theresa O'Rourke Nugent
- Main IPC: G03F7/26
- IPC: G03F7/26
Abstract:
A process for tuning the water contact angle of an immersion photoresist layer or immersion topcoat layer by modification of the top surface. The surface modification is a layer of fluorinated polymer.
Public/Granted literature
- US20080166667A1 Tunable contact angle process for immersionlithography topcoats and photoresists Public/Granted day:2008-07-10
Information query
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