Invention Grant
- Patent Title: Method and apparatus for forming a thin lamina
- Patent Title (中): 用于形成薄层的方法和装置
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Application No.: US13331915Application Date: 2011-12-20
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Publication No.: US08435804B2Publication Date: 2013-05-07
- Inventor: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
- Applicant: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
- Applicant Address: US NH Nashua
- Assignee: GTAT Corporation
- Current Assignee: GTAT Corporation
- Current Assignee Address: US NH Nashua
- Agency: The Mueller Law Office, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0224
Abstract:
A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and separably contacting the donor body with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body, and a deforming force is applied to the lamina or to the donor body to separate the lamina from the donor body.
Public/Granted literature
- US20120168091A1 Method and Apparatus for Forming a Thin Lamina Public/Granted day:2012-07-05
Information query
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