Invention Grant
- Patent Title: Method for manufacturing semiconductor memory device
- Patent Title (中): 制造半导体存储器件的方法
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Application No.: US13218868Application Date: 2011-08-26
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Publication No.: US08435857B2Publication Date: 2013-05-07
- Inventor: Masahiro Kiyotoshi
- Applicant: Masahiro Kiyotoshi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-007323 20110117
- Main IPC: H01L21/8247
- IPC: H01L21/8247

Abstract:
According to one embodiment, a method for manufacturing a semiconductor memory device, includes forming a stacked body on a substrate by alternately stacking a first insulating film and a second insulating film, making a through-hole extending in a stacking direction of the first insulating film and the second insulating film to pierce the stacked body, forming at least a portion of a blocking insulating film, a charge trap film, and a tunneling dielectric film of a MONOS on an inner surface of the through-hole, forming a channel semiconductor on the tunneling dielectric film, making a trench in the stacked body, removing the second insulating film by performing etching via the trench, and filling a conductive material into a space made by the removing of the second insulating film.
Public/Granted literature
- US20120184078A1 METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2012-07-19
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