Invention Grant
- Patent Title: Semiconductor device and the method of manufacturing the same
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US13329712Application Date: 2011-12-19
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Publication No.: US08435888B2Publication Date: 2013-05-07
- Inventor: Koji Sasaki , Kazuo Matsuzaki , Takashi Kobayashi
- Applicant: Koji Sasaki , Kazuo Matsuzaki , Takashi Kobayashi
- Applicant Address: JP
- Assignee: Fuji Electric Co., Ltd.
- Current Assignee: Fuji Electric Co., Ltd.
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2007-258649 20071002
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A semiconductor device includes a semiconductor substrate; a metal electrode wiring laminate on the semiconductor substrate, the metal electrode wiring laminate being patterned with a predetermined wiring pattern; the metal electrode wiring laminate including an undercoating barrier metal laminate and aluminum or aluminum alloy film on the undercoating barrier metal laminate; and organic passivation film covering the metal electrode wiring laminate, wherein the barrier metal laminate is a three-layered laminate including titanium films sandwiching a titanium nitride film. The semiconductor device according to the invention facilitates improving the moisture resistance of the portion of the barrier metal laminate exposed temporarily in the manufacturing process, facilitates employing only one passivation film, facilitates preventing the failures caused by cracks from occurring and the failures caused by Si nodules remaining in the aluminum alloy from increasing.
Public/Granted literature
- US20120088364A1 SEMICONDUCTOR DEVICE AND THE METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-04-12
Information query
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