Invention Grant
- Patent Title: Gate insulating film forming agent for thin-film transistor
- Patent Title (中): 用于薄膜晶体管的栅极绝缘膜形成剂
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Application No.: US12451730Application Date: 2008-05-28
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Publication No.: US08436339B2Publication Date: 2013-05-07
- Inventor: Shinichi Maeda , Takahiro Kishioka
- Applicant: Shinichi Maeda , Takahiro Kishioka
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-143772 20070530
- International Application: PCT/JP2008/059819 WO 20080528
- International Announcement: WO2008/146847 WO 20081204
- Main IPC: H01L29/08
- IPC: H01L29/08

Abstract:
There is provided a novel gate insulating film forming material in consideration of not only initial electric properties immediately after the production of a gate insulating film, but also electric properties after other steps are performed while producing a thin-film transistor using the gate insulating film, and even reliability in the electric properties of the produced element. A gate insulating film forming agent for a thin-film transistor comprising an oligomer compound or a polymer compound, both of which contain a repeating unit having a triazinetrione ring containing a hydroxyalkyl-containing group as a substituent on a nitrogen atom, and a solvent; a gate insulating film produced from the gate insulating film forming agent; a thin-film transistor having the gate insulating film; and a method for producing the gate insulating film or thin-film transistor.
Public/Granted literature
- US20100133518A1 GATE INSULATING FILM FORMING AGENT FOR THIN-FILM TRANSISTOR Public/Granted day:2010-06-03
Information query
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