Invention Grant
- Patent Title: Method for forming a back-side illuminated image sensor
- Patent Title (中): 用于形成背面照明图像传感器的方法
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Application No.: US12942451Application Date: 2010-11-09
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Publication No.: US08436440B2Publication Date: 2013-05-07
- Inventor: Michel Marty , François Leverd
- Applicant: Michel Marty , François Leverd
- Applicant Address: FR Crolles FR Montrouge
- Assignee: STMicroelectronics (Crolles 2) SAS,STMicroelectronics S.A.
- Current Assignee: STMicroelectronics (Crolles 2) SAS,STMicroelectronics S.A.
- Current Assignee Address: FR Crolles FR Montrouge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: FR0957950 20091110
- Main IPC: H01L31/14
- IPC: H01L31/14

Abstract:
A method for manufacturing a back-side illuminated image sensor, including the steps of: forming, inside and on top of an SOI-type silicon layer, components for trapping and transferring photogenerated carriers and isolation regions; forming a stack of interconnection levels on the silicon layer and attaching, on the interconnect stack, a semiconductor handle; removing the semiconductor support; forming, in the insulating layer and the silicon layer, trenches reaching the isolation regions; depositing a doped amorphous silicon layer, more heavily doped than the silicon layer, at least on the walls and the bottom of the trenches and having the amorphous silicon layer crystallize; and filling the trenches with a reflective material.
Public/Granted literature
- US20110108939A1 METHOD FOR FORMING A BACK-SIDE ILLUMINATED IMAGE SENSOR Public/Granted day:2011-05-12
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