Invention Grant
- Patent Title: Boundary acoustic wave device
- Patent Title (中): 边界声波装置
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Application No.: US12913847Application Date: 2010-10-28
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Publication No.: US08436510B2Publication Date: 2013-05-07
- Inventor: Takashi Yamane , Takeshi Nakao
- Applicant: Takashi Yamane , Takeshi Nakao
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2008-118601 20080430
- Main IPC: H01L41/083
- IPC: H01L41/083

Abstract:
A boundary acoustic wave device includes a piezoelectric substrate made of single-crystalline LiTaO3, a first medium layer disposed on the piezoelectric substrate and made of a dielectric, a second medium layer disposed on the first medium layer and made of a dielectric having a sound velocity different from that of the first medium layer, and at least one interdigital electrode disposed at the boundary between the piezoelectric substrate and the first medium layer. The sound velocity of the first medium layer is less than the sound velocity of LiTaO3. The sound velocity of the second medium layer is greater than the sound velocity of LiTaO3. The inequality (h/λ)×a≦0.05 is satisfied, where H is the thickness of the first medium layer, h is the thickness of the interdigital electrode, λ is the period of electrode fingers of the interdigital electrode, and a is the ratio of the density of a metal of the interdigital electrode to the density of Au.
Public/Granted literature
- US20110037344A1 BOUNDARY ACOUSTIC WAVE DEVICE Public/Granted day:2011-02-17
Information query
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