Invention Grant
- Patent Title: Infrared emitter arrangement for high-temperature vacuum processes
- Patent Title (中): 用于高温真空工艺的红外发射器装置
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Application No.: US13140609Application Date: 2009-11-13
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Publication No.: US08436523B2Publication Date: 2013-05-07
- Inventor: Sven Linow
- Applicant: Sven Linow
- Applicant Address: DE Hanau
- Assignee: Heraeus Noblelight GmbH
- Current Assignee: Heraeus Noblelight GmbH
- Current Assignee Address: DE Hanau
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Priority: DE102008063677 20081219
- International Application: PCT/EP2009/008076 WO 20091113
- International Announcement: WO2010/069438 WO 20100624
- Main IPC: H01J5/00
- IPC: H01J5/00
Abstract:
An infrared emitter has at least one emitter tube (11) having pinched sections at each of its ends. At least one opaque tube portion (12) is arranged in a manner welded in alignment with the at least one emitter tube. The infrared emitter may be installed in a processing chamber (21).
Public/Granted literature
- US20110248621A1 INFRARED EMITTER ARRANGEMENT FOR HIGH-TEMPERATURE VACUUM PROCESSES Public/Granted day:2011-10-13
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