Invention Grant
- Patent Title: MEMS-based tunable filter
- Patent Title (中): 基于MEMS的可调滤波器
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Application No.: US12610735Application Date: 2009-11-02
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Publication No.: US08436698B2Publication Date: 2013-05-07
- Inventor: John E. Rogers
- Applicant: John E. Rogers
- Applicant Address: US FL Melbourne
- Assignee: Harris Corporation
- Current Assignee: Harris Corporation
- Current Assignee Address: US FL Melbourne
- Agency: Fox Rothschild, LLP
- Agent Robert J. Sacco
- Main IPC: H03H9/46
- IPC: H03H9/46 ; H03H9/125 ; H03H7/01 ; H03H7/075 ; H03H3/00 ; H02N2/02 ; H01L21/02 ; H01L29/93

Abstract:
A filter device is provided including a substrate (302) and a plurality of horizontal gap closing actuator (GCA) devices (550) disposed on a first surface of the substrate. The plurality of GCA devices includes and one or more GCA varactors (700). Each one of the plurality of horizontal GCA devices includes at least one drive comb structure (602a, 602b, 702a, 702b), at least one input/output (I/O) comb structure (616a, 676b, 716a, 716b), and at least one truss comb structure (604, 704) interdigitating the drive comb and the I/O comb structures. The truss comb structure is configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between the truss comb structure and the drive comb structure.
Public/Granted literature
- US20110102105A1 MEMS-BASED TUNABLE FILTER Public/Granted day:2011-05-05
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