Invention Grant
- Patent Title: Illumination optical apparatus, relay optical system, exposure apparatus, and device manufacturing method
- Patent Title (中): 照明光学装置，中继光学系统，曝光装置和装置制造方法
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Application No.: US12061854Application Date: 2008-04-03
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Publication No.: US08436980B2Publication Date: 2013-05-07
- Inventor: Hiromi Suda
- Applicant: Hiromi Suda
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Division
- Priority: JP2007-112299 20070420
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G02B23/24
Abstract:
An illumination optical apparatus guides to an illumination object a light beam emitted from a light source. The illumination optical apparatus includes an enlarging optical system, disposed between the light source and the illumination object, and a reduction optical system, disposed between the enlarging optical system and the illumination object. The enlarging optical system is formed so that an image plane is disposed between the light source and the illumination object.
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