- Patent Title: Exposing method, exposure apparatus, and device fabricating method
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Application No.: US12318761Application Date: 2009-01-08
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Publication No.: US08436981B2Publication Date: 2013-05-07
- Inventor: Akimitsu Ebihara
- Applicant: Akimitsu Ebihara
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2008-003740 20080110
- Main IPC: G03B27/54
- IPC: G03B27/54

Abstract:
An exposing method that forms a pattern of a reticle on a wafer is provided. In the method, part of the pattern of the reticle in an illumination area, which is illuminated by illumination light from an illumination optical system, is illuminated, and while scanning the illumination area with respect to the reticle in the +Y direction (or the −Y direction) by pivoting a deflection mirror, the reticle is moved in the corresponding −Y direction (or the +Y direction) and the wafer is moved in a direction that corresponds to the movement direction of the reticle.
Public/Granted literature
- US20090268177A1 Exposing method, exposure apparatus, and device fabricating method Public/Granted day:2009-10-29
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