Invention Grant
- Patent Title: Inspection apparatus using a chip
- Patent Title (中): 检验仪器使用芯片
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Application No.: US12923881Application Date: 2010-10-13
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Publication No.: US08436989B2Publication Date: 2013-05-07
- Inventor: Yoshimasa Ogawa , Kazuyuki Kaneda
- Applicant: Yoshimasa Ogawa , Kazuyuki Kaneda
- Applicant Address: JP Tokyo
- Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Rader, Fishman & Grauer PLLC
- Priority: JP2009-239910 20091016
- Main IPC: G01N1/10
- IPC: G01N1/10

Abstract:
An inspection apparatus using a chip includes a rotor that holds a chip; a measurement room in which the rotor is provided and a through hole is formed; a light source that emits light for measurement to the chip through the through hole; a light measurement unit that detects the light from the chip, a rotation drive mechanism that rotates the rotor; and a cover member capable of covering or uncovering an opening portion.
Public/Granted literature
- US20110090490A1 Inspection apparatus using a chip Public/Granted day:2011-04-21
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