Invention Grant
US08437006B2 Displacement sensor with embedded coherent electromagnetic radiation interferometer for micro scale proximity measurements
有权
具有嵌入式相干电磁辐射干涉仪的位移传感器，用于微尺度接近测量
- Patent Title: Displacement sensor with embedded coherent electromagnetic radiation interferometer for micro scale proximity measurements
- Patent Title (中): 具有嵌入式相干电磁辐射干涉仪的位移传感器，用于微尺度接近测量
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Application No.: US12958577Application Date: 2010-12-02
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Publication No.: US08437006B2Publication Date: 2013-05-07
- Inventor: Nicholas G. Dagalakis , Yong-Sik Kim
- Applicant: Nicholas G. Dagalakis , Yong-Sik Kim
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
The present invention is an interferometer sensor which uses frequency modulated coherent electromagnetic radiation to noncontact measure the displacement of moving targets with high precision. The sensor has an embedded interferometer comprised of an electromagnetic radiation source, a plurality of electromagnetic waveguides, interferometric and extension waveguides, a refractive index gel, or angled end face and an electromagnetic radiation detector.
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