Invention Grant
US08437058B2 Computer generated hologram and exposure apparatus to suppress an illumination variation and loss in light
失效
计算机生成的全息图和曝光装置来抑制光的照射变化和光损失
- Patent Title: Computer generated hologram and exposure apparatus to suppress an illumination variation and loss in light
- Patent Title (中): 计算机生成的全息图和曝光装置来抑制光的照射变化和光损失
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Application No.: US12682598Application Date: 2008-12-12
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Publication No.: US08437058B2Publication Date: 2013-05-07
- Inventor: Isao Matsubara
- Applicant: Isao Matsubara
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-341122 20071228
- International Application: PCT/JP2008/073136 WO 20081212
- International Announcement: WO2009/084466 WO 20090709
- Main IPC: G03H1/08
- IPC: G03H1/08
Abstract:
A present invention provides a computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram including a first anisotropic cell and second anisotropic cell configured to change a polarization state of the incident light, and a first isotropic cell and second isotropic cell configured not to change the polarization state of the incident light, wherein a direction of an optic axis of the first anisotropic cell is different from a direction of an optic axis of the second anisotropic cell, and a thickness of the first isotropic cell is different from a thickness of the second isotropic cell.
Public/Granted literature
- US20100220372A1 COMPUTER GENERATED HOLOGRAM AND EXPOSURE APPARATUS Public/Granted day:2010-09-02
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