Invention Grant
- Patent Title: MEMS device with opposite polarity spring bimorph
- Patent Title (中): 具有相反极性的微机电装置弹簧双压电晶片
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Application No.: US12413196Application Date: 2009-03-27
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Publication No.: US08438923B2Publication Date: 2013-05-14
- Inventor: Firas Sammoura , Kuang Yang
- Applicant: Firas Sammoura , Kuang Yang
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01P15/09
- IPC: G01P15/09
Abstract:
A MEMS device has a mass supported at least in part by a spring. Among other things, the spring has first and second layers, and first and a second electrodes. The first and second layers are between the first and second electrodes, and the first and second layers, which are oppositely polarized, form a bimorph.
Public/Granted literature
- US20100242604A1 MEMS Device with Opposite Polarity Spring Bimorph Public/Granted day:2010-09-30
Information query
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