Invention Grant
US08439051B2 Method of substrate processing, substrate processing system, and storage medium 有权
基板处理方法,基板处理系统和存储介质

  • Patent Title: Method of substrate processing, substrate processing system, and storage medium
  • Patent Title (中): 基板处理方法,基板处理系统和存储介质
  • Application No.: US12083466
    Application Date: 2007-04-12
  • Publication No.: US08439051B2
    Publication Date: 2013-05-14
  • Inventor: Kazuhisa Matsumoto
  • Applicant: Kazuhisa Matsumoto
  • Applicant Address: JP Minato-Ku
  • Assignee: Tokyo Electron Limited
  • Current Assignee: Tokyo Electron Limited
  • Current Assignee Address: JP Minato-Ku
  • Agency: Burr & Brown
  • Priority: JP2006-135489 20060515
  • International Application: PCT/JP2007/058070 WO 20070412
  • International Announcement: WO2007/132609 WO 20071122
  • Main IPC: B08B3/00
  • IPC: B08B3/00
Method of substrate processing, substrate processing system, and storage medium
Abstract:
The present invention provides a substrate processing system in which a processing liquid is supplied to a substrate W from a processing nozzle 50a situated above the substrate W so as to process the substrate W, and which makes it possible to prevent unintended dripping of the processing liquid from the processing nozzle. A substrate processing system 20 comprises a processing nozzle 50a capable of supplying a processing liquid to a substrate to be processed, an arm 54 supporting the processing nozzle, and droplet removing nozzles 60, 62 capable of blowing a gas to the processing nozzle. The arm is movable between a processing position and a waiting position, the processing nozzle being above a substrate when the arm is in the waiting position and being outside a substrate when the arm is in the processing position. The droplet removing nozzles are so situated that they are in the vicinity of the processing nozzle when the arm is in the waiting position.
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