Invention Grant
US08440017B2 Method for growing group 13 nitride crystal and group 13 nitride crystal
有权
生长13族氮化物晶体和13族氮化物晶体的方法
- Patent Title: Method for growing group 13 nitride crystal and group 13 nitride crystal
- Patent Title (中): 生长13族氮化物晶体和13族氮化物晶体的方法
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Application No.: US13208944Application Date: 2011-08-12
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Publication No.: US08440017B2Publication Date: 2013-05-14
- Inventor: Takanao Shimodaira , Takayuki Hirao , Katsuhiro Imai
- Applicant: Takanao Shimodaira , Takayuki Hirao , Katsuhiro Imai
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2009-032779 20090216
- Main IPC: C30B19/00
- IPC: C30B19/00

Abstract:
To grow a gallium nitride crystal, a seed-crystal substrate is first immersed in a melt mixture containing gallium and sodium. Then, a gallium nitride crystal is grown on the seed-crystal substrate under heating the melt mixture in a pressurized atmosphere containing nitrogen gas and not containing oxygen. At this time, the gallium nitride crystal is grown on the seed-crystal substrate under a first stirring condition of stirring the melt mixture, the first stirring condition being set for providing a rough growth surface, and the gallium nitride crystal is subsequently grown on the seed-crystal substrate under a second stirring condition of stirring the melt mixture, the second stirring condition being set for providing a smooth growth surface.
Public/Granted literature
- US20120012984A1 METHOD FOR GROWING GROUP 13 NITRIDE CRYSTAL AND GROUP 13 NITRIDE CRYSTAL Public/Granted day:2012-01-19
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