Invention Grant
US08440018B2 Apparatus for supplying source and apparatus for deposition thin film having the same
有权
用于提供源的装置和用于具有该源的沉积薄膜的装置
- Patent Title: Apparatus for supplying source and apparatus for deposition thin film having the same
- Patent Title (中): 用于提供源的装置和用于具有该源的沉积薄膜的装置
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Application No.: US12467217Application Date: 2009-05-15
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Publication No.: US08440018B2Publication Date: 2013-05-14
- Inventor: Kyoo Hwan Lee , Hyung Sup Lee
- Applicant: Kyoo Hwan Lee , Hyung Sup Lee
- Applicant Address: KR
- Assignee: Jusung Engineering Co., Ltd.
- Current Assignee: Jusung Engineering Co., Ltd.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2008-0048016 20080523
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
The present invention provides an apparatus for supplying a source and an apparatus for depositing a thin film having the same. The apparatus for supplying a source includes a horizontal channel extending in one direction; pumping and transfer ports extending to pass through the horizontal channel, the pumping and transfer ports being spaced apart from each other; a transfer shaft inserted into the horizontal channel to reciprocate therein; and a storage room connected to one side of the pumping port, the storage room storing and supplying a powder source, wherein the transfer shaft comprises at least one transfer hole for allowing the powder source supplied through the pumping port to be filled therein and to be transferred to an external apparatus through the transfer port. As described above, according to the present invention, a powder source filled in a transfer hole is supplied to an external apparatus by reciprocating a transfer shaft, so that the amount of the powder source supplied to the external apparatus can be quantitatively controlled as much as a fixed quantity corresponding to the internal volume of the transfer hole.
Public/Granted literature
- US20090288600A1 APPARATUS FOR SUPPLYING SOURCE AND APPARATUS FOR DEPOSITION THIN FILM HAVING THE SAME Public/Granted day:2009-11-26
Information query
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