Invention Grant
US08440474B2 Chip quality determination method and marking mechanism using same 失效
芯片质量测定方法及使用标记机制

  • Patent Title: Chip quality determination method and marking mechanism using same
  • Patent Title (中): 芯片质量测定方法及使用标记机制
  • Application No.: US13002795
    Application Date: 2009-07-15
  • Publication No.: US08440474B2
    Publication Date: 2013-05-14
  • Inventor: Hirokazu Yanai
  • Applicant: Hirokazu Yanai
  • Applicant Address: JP Tokyo
  • Assignee: Ricoh Company, Ltd.
  • Current Assignee: Ricoh Company, Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: Cooper & Dunham LLP
  • Priority: JP2008-188687 20080722
  • International Application: PCT/JP2009/063144 WO 20090715
  • International Announcement: WO2010/010907 WO 20100128
  • Main IPC: H01L21/66
  • IPC: H01L21/66 G01R31/26
Chip quality determination method and marking mechanism using same
Abstract:
A chip quality determination method includes the steps of (a) determining the continuity of defective chips in at least four directions of an X-axis and a Y-axis on a wafer based on the wafer test result of determining the acceptability of chips arranged in a matrix in the four directions on the wafer, and dividing the defective chips into one or more defective groups so that successive ones of the defective chips are in the same defective group; (b) calculating a quality determination index of each of one or more determination target wafer periphery neighboring chips among wafer periphery neighboring chips located within a predetermined range from the periphery of the wafer based on the distance from a corresponding one of the defective groups; and (c) determining the quality of the determination target wafer periphery neighboring chips by comparing the quality determination indexes thereof with a preset threshold.
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