Invention Grant
- Patent Title: Solid-state imaging apparatus and manufacturing method thereof
- Patent Title (中): 固态成像装置及其制造方法
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Application No.: US12416228Application Date: 2009-04-01
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Publication No.: US08440493B2Publication Date: 2013-05-14
- Inventor: Takehiro Toyoda
- Applicant: Takehiro Toyoda
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2008-098166 20080404
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L33/08

Abstract:
A solid-state imaging apparatus and a manufacturing method of a solid-state imaging apparatus are provided. Metal wirings 102 and 103 are formed in an effective pixel region A and out-of effective pixel region B of a semiconductor substrate 100, and an etch stop layer 118 is formed over the metal wirings 102 and 103. Moreover, an insulating film 119 is formed on the etch stop layer 118, and another metal wiring 104 is formed on the insulating film 119 in the out-of effective pixel region B. Next, the insulating film 119 in the effective pixel region A is removed by using the etch stop layer 118, and interlayer lenses 105 are formed in the step in the effective pixel region A where the insulating film 119 is removed.
Public/Granted literature
- US20090251573A1 SOLID-STATE IMAGING APPARATUS AND MANUFACTURING METHOD THEREOF Public/Granted day:2009-10-08
Information query
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