Invention Grant
- Patent Title: Hydrogen barrier for ferroelectric capacitors
- Patent Title (中): 铁电电容器的氢屏障
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Application No.: US12718691Application Date: 2010-03-05
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Publication No.: US08440508B2Publication Date: 2013-05-14
- Inventor: Kezhakkedath R. Udayakumar , Scott R. Summerfelt , Ted S. Moise , Manoj K. Jain
- Applicant: Kezhakkedath R. Udayakumar , Scott R. Summerfelt , Ted S. Moise , Manoj K. Jain
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Rose Alyssa Keagy; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/00 ; H01L21/44 ; H01L21/4763
Abstract:
An integrated circuit containing a FeCap array. The FeCap array is at least partially surrounded on the sides by hydrogen barrier walls and on the top by a hydrogen barrier top plate. A method for at least partially enclosing a FeCap array with hydrogen barrier walls and a hydrogen barrier top plate.
Public/Granted literature
- US20110062550A1 HYDROGEN BARRIER FOR FERROELECTRIC CAPACITORS Public/Granted day:2011-03-17
Information query
IPC分类:
