Invention Grant
US08440532B2 Structure and method for making metal semiconductor field effect transistor (MOSFET) with isolation last process
失效
制造具有隔离最后工艺的金属半导体场效应晶体管(MOSFET)的结构和方法
- Patent Title: Structure and method for making metal semiconductor field effect transistor (MOSFET) with isolation last process
- Patent Title (中): 制造具有隔离最后工艺的金属半导体场效应晶体管(MOSFET)的结构和方法
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Application No.: US12844478Application Date: 2010-07-27
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Publication No.: US08440532B2Publication Date: 2013-05-14
- Inventor: Huilong Zhu , Qingqing Liang , Zhijiong Luo , Haizhou Yin
- Applicant: Huilong Zhu , Qingqing Liang , Zhijiong Luo , Haizhou Yin
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Joseph P. Abate, Esq.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
In one embodiment, a method of providing a semiconductor device is provided, in which instead of forming isolation regions before the formation of the semiconductor devices, the isolation regions are formed after the semiconductor devices. In one embodiment, the method includes forming a semiconductor device on a semiconductor substrate. A placeholder dielectric is formed on a portion of a first surface of the substrate adjacent to the semiconductor device. A trench is etched into the substrate from a second surface of the substrate that is opposite the first surface of the substrate, wherein the trench terminates on the placeholder dielectric. The trench is filled with a dielectric material.
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