Invention Grant
US08440559B2 Work function adjustment in high-K metal gate electrode structures by selectively removing a barrier layer
有权
通过选择性去除阻挡层,在高K金属栅电极结构中进行功函数调整
- Patent Title: Work function adjustment in high-K metal gate electrode structures by selectively removing a barrier layer
- Patent Title (中): 通过选择性去除阻挡层,在高K金属栅电极结构中进行功函数调整
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Application No.: US13624235Application Date: 2012-09-21
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Publication No.: US08440559B2Publication Date: 2013-05-14
- Inventor: Markus Lenski , Klaus Hempel , Vivien Schroeder , Robert Binder , Joachim Metzger
- Applicant: Globalfoundries Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Priority: DE102009023376 20090529
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
Generally, the present disclosure is directed work function adjustment in high-k metal gate electrode structures. In one illustrative embodiment, a method is disclosed that includes removing a placeholder material of a first gate electrode structure and a second gate electrode structure, and forming a first work function adjusting material layer in the first and second gate electrode structures, wherein the first work function adjusting material layer includes a tantalum nitride layer. The method further includes removing a portion of the first work function adjusting material layer from the second gate electrode structure by using the tantalum nitride layer as an etch stop layer, removing the tantalum nitride layer by performing a wet chemical etch process, and forming a second work function adjusting material layer in the second gate electrode structure and above a non-removed portion of the first work function adjusting material layer in the first gate electrode structure.
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