Invention Grant
US08440977B2 Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus and radiation imaging system
有权
放射线检测装置的制造方法以及放射线检测装置和放射线成像系统
- Patent Title: Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus and radiation imaging system
- Patent Title (中): 放射线检测装置的制造方法以及放射线检测装置和放射线成像系统
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Application No.: US12676352Application Date: 2008-11-04
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Publication No.: US08440977B2Publication Date: 2013-05-14
- Inventor: Takamasa Ishii , Chiori Mochizuki , Minoru Watanabe
- Applicant: Takamasa Ishii , Chiori Mochizuki , Minoru Watanabe
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-287402 20071105; JP2008-273193 20081023
- International Application: PCT/JP2008/070370 WO 20081104
- International Announcement: WO2009/060968 WO 20090514
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
The object of the invention is to realize a light radiation-detecting apparatus including a step of preparing a matrix array including a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, wherein the pixel includes a conversion element converting an incident radiation into an electric signal, and connection electrode arranged at a periphery of the plurality of pixels, fixing a flexible supporting member for covering the plurality of pixels to the matrix array at a side opposite to the substrate, and releasing the substrate from the matrix array.
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