Invention Grant
US08440977B2 Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus and radiation imaging system 有权
放射线检测装置的制造方法以及放射线检测装置和放射线成像系统

Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus and radiation imaging system
Abstract:
The object of the invention is to realize a light radiation-detecting apparatus including a step of preparing a matrix array including a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, wherein the pixel includes a conversion element converting an incident radiation into an electric signal, and connection electrode arranged at a periphery of the plurality of pixels, fixing a flexible supporting member for covering the plurality of pixels to the matrix array at a side opposite to the substrate, and releasing the substrate from the matrix array.
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