Invention Grant
- Patent Title: Pulsed discharge extreme ultraviolet source with magnetic shield
- Patent Title (中): 脉冲放电极紫外光源带磁屏蔽
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Application No.: US12964385Application Date: 2010-12-09
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Publication No.: US08440988B2Publication Date: 2013-05-14
- Inventor: Malcolm W. McGeoch
- Applicant: Malcolm W. McGeoch
- Applicant Address: US MA Fall River
- Assignee: PLEX LLC
- Current Assignee: PLEX LLC
- Current Assignee Address: US MA Fall River
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G21G1/00
- IPC: G21G1/00

Abstract:
A magnetically shielded, efficient plasma generation configuration for a pulsed discharge extreme ultraviolet (EUV) light source comprises two opposed convex electrodes mounted with axes parallel to a static magnetic field. A limiter aperture disposed between the electrodes, in conjunction with the field lines, defines a hollow plasma cylinder connecting the electrodes. A high pulsed voltage and current compresses the plasma cylinder and its interior magnetic field onto the electrode surfaces to create a magnetic insulating layer at the same time as propelling the working gas from each side toward the space between the electrode tips. The plasma then collapses radially in a three-dimensional compression to form a dense plasma on the axis of the device with radiation of extreme ultraviolet light.
Public/Granted literature
- US20120146510A1 PULSED DISCHARGE EXTREME ULTRAVIOLET SOURCE WITH MAGNETIC SHIELD Public/Granted day:2012-06-14
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