Invention Grant
- Patent Title: Thin-film transistor, display device, and manufacturing method for thin-film transistors
- Patent Title (中): 薄膜晶体管,显示装置和薄膜晶体管的制造方法
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Application No.: US13383077Application Date: 2010-07-08
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Publication No.: US08441016B2Publication Date: 2013-05-14
- Inventor: Tsuyoshi Inoue , Tohru Okabe , Tetsuya Aita , Michiko Takei , Yoshiyuki Harumoto , Takeshi Yaneda
- Applicant: Tsuyoshi Inoue , Tohru Okabe , Tetsuya Aita , Michiko Takei , Yoshiyuki Harumoto , Takeshi Yaneda
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Chen Yoshimura LLP
- Priority: JP2009-166005 20090714
- International Application: PCT/JP2010/061606 WO 20100708
- International Announcement: WO2011/007711 WO 20110120
- Main IPC: H01L33/08
- IPC: H01L33/08

Abstract:
Disclosed is a high-quality, efficiently manufacturable thin film transistor in which leakage current is minimized. The thin film transistor is provided with a semiconductor layer (34) that contains a channel region (34C) having a microcrystalline semiconductor; source and drain contact layers (35S and 35D) that contains impurities; a first source metal layer (36S) and a first drain metal layer (36D), and a second source metal layer (37S) and a second drain metal layer (37D). The end portion of the second metal source layer (37S) is located at a position receded from the end portion of the first metal source layer (36S) and the end portion of the second drain metal layer (37D) is located at a position receded from the end portion of the first drain metal layer (36D). The semiconductor layer (34) contains low concentration impurity diffusion regions formed near the end portions of the aforementioned source contact layer (35S) and drain contact layer (35D).
Public/Granted literature
- US20120104406A1 THIN-FILM TRANSISTOR, DISPLAY DEVICE, AND MANUFACTURING METHOD FOR THIN-FILM TRANSISTORS Public/Granted day:2012-05-03
Information query
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